Nano-scale Raman thermometry of diamond
thesisposted on 28.03.2022, 14:05 authored by Oliver Conquest
Raman spectroscopy is well established over a broad range of interdisciplinary applications, which include optical imaging, crystallographic probing, spectroscopy and thermometry. The basis of this thesis is Raman thermometry with nanodiamond, i.e. nano-scale diamond crystals, and its application for characterising integrated transistor circuits. Firstly, an extensive review of Raman scattering, spectroscopy, thermometry and diamond properties is developed. Then, attention is focused on the experimental implementation of Raman thermometry with bulk and 250 nm diamond crystals. As an initial experimental step and under well-controlled conditions, the temperature dependence of the Raman line shift and width is characterised. In a second step, a preliminary measurement on a real semiconductor chip is carried out. The results open up a path towards the practical and robust implementation of a nanoscale temperature sensor for device characterisation.