Macquarie University
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Novel UV direct write fabrication technique for surface electronic structures on diamond

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posted on 2022-03-29, 00:01 authored by Mojtaba Moshkani
This thesis examines the feasibility of using a novel UV etching process to enhance fabrication of electronic devices on hydrogen-terminated diamond surfaces. Diamond is considered as a potential material for high performance electronic applications due to its unique and extreme mechanical and electronic properties. A p-type conductivity originating from a hydrogen terminated diamond surface forms the basis for a variety of electronic devices. In this thesis, the highly-controlled surface modification provided by UV etching has been used to simplify fabrication process of some electronic devices. Resistors, a Schottky diode, and a MOSFET have been fabricated using the technique, and their electrical properties are presented. The potential for the technique to enhance diamond surface MOSFETs performance is discussed.


Table of Contents

1. Introduction -- 2. Background -- 3. UV etching : a novel tool for surface processing -- 4. Instrumentation, experimental and measurements methods -- 5. Results and discussion -- 6. Conclusions and future works -- Appendix -- References.


Bibliography: pages 43-46 Empirical thesis.

Awarding Institution

Macquarie University

Degree Type

Thesis MRes


MRes, Macquarie University, Faculty of Science and Engineering, Department of Physics and Astronomy

Department, Centre or School

Department of Physics and Astronomy

Year of Award


Principal Supervisor

Richard Paul Mildren

Additional Supervisor 1

James E. Downes


Copyright Mojtaba Moshkani 2017. Copyright disclaimer:




1 online resource (xvi, 46 pages) illustrations (some colour)

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