01whole.pdf (12.19 MB)
thesisposted on 2022-03-28, 13:52 authored by Timo Mayer
In nanofluidic applications and MEMS applications two pieces of glass substrate often need to be bonded together permanently. in these cases, it can be difficult or cumbersome to use adhesives. Fusion bonding represents an alternative which can bond pieces of glass substrate to each other permanently without the hassle of adhesives or extra materials. In order to bond the glass substrates, it is necessary to clean them to remove any contamination. There are different ways of going about this, and this project aims to investigate these different cleaning procedures in order to determine the optimal one.