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Fusion bonding

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thesis
posted on 28.03.2022, 13:52 authored by Timo Mayer
In nanofluidic applications and MEMS applications two pieces of glass substrate often need to be bonded together permanently. in these cases, it can be difficult or cumbersome to use adhesives. Fusion bonding represents an alternative which can bond pieces of glass substrate to each other permanently without the hassle of adhesives or extra materials. In order to bond the glass substrates, it is necessary to clean them to remove any contamination. There are different ways of going about this, and this project aims to investigate these different cleaning procedures in order to determine the optimal one.

History

Table of Contents

1. Introduction -- 2. Background & theory -- 3. Methodology -- 4. Results -- Bibliography.

Notes

Bibliography: pages 47-49 Empirical thesis.

Awarding Institution

Macquarie University

Degree Type

Thesis bachelor honours

Degree

BSc (Hons), Macquarie University, Faculty of Science and Engineering, School of Engineering

Department, Centre or School

School of Engineering

Year of Award

2017

Principal Supervisor

David Inglis

Rights

Copyright Timo Mayer 2017. Copyright disclaimer: http://mq.edu.au/library/copyright

Language

English

Extent

1 online resource (xv, 49 pages colour illustrations)

Former Identifiers

mq:70398 http://hdl.handle.net/1959.14/1263366

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